A “Thru-Short-Open” De-embedding Method for Accurate On-Wafer RF Measurements of Nano-Scale MOSFETs

A Flexible Microwave De-Embedding Method for On-Wafer Noise Parameter Characterization of MOSFETs

A flexible noise de-embedding method for on-wafer microwave measurements of silicon MOSFETs is presented in this study. We use the open, short, and thru dummy structures to subtract the parasitic effects from the probe pads and interconnects of a fixtured MOS transistor. The thru standard are used to extract the interconnect parameters for subtracting the interconnect parasitics in gate, drain,...

A thru-only de-embedding method for on-wafer characterization of multiport networks

Applications of Artificial Neural Networks to RF and Microwave Measurements

This article describes how artificial neural networks (ANNs) can be used to benefit a number of RF and microwave measurement areas including vector network analysis (VNA). We apply ANNs to model a variety of on-wafer and coaxial VNA calibrations, including open-short-load-thru (OSLT) and line-reflect-match (LRM), and assess the accuracy of the calibrations using these ANN-modeled standards. We ...

A simple de-embeding method for on-wafer RF CMOS FET using two microstrip lines

This letter deals with the de-embedding of on-wafer CMOS FETs embedded in symmetrical and reciprocals pads. A de-embedding method, that uses a calibrated vector network analyzer and two microstrip lines fabricated on a lossy SiO2-Si substrate, is introduced. The proposed method not only allows the characterization on the interconnection lines but also allows the characterization of the CMOS pad...

Ground-Shielded Measuring Technique for Accurate On-Wafer Characterization of RF CMOS Devices

This paper presents a new test fixture with associated deembedding procedure for effecient and accurate on-wafer device measurements at microwave frequencies. The fixture is based on a substrate shield and (i) provides an accurate common ground for N-port measurements, (ii) effectively reduces substrate carried coupling, (iii) gives well-defined parasitics for simplified de-embedding, and (iv) ...